diff --git a/doc/classes/PhysicsRayQueryParameters3D.xml b/doc/classes/PhysicsRayQueryParameters3D.xml
index 620aa6bf5f3..03d6939e6d2 100644
--- a/doc/classes/PhysicsRayQueryParameters3D.xml
+++ b/doc/classes/PhysicsRayQueryParameters3D.xml
@@ -14,7 +14,7 @@
 			<param index="0" name="from" type="Vector3" />
 			<param index="1" name="to" type="Vector3" />
 			<param index="2" name="collision_mask" type="int" default="4294967295" />
-			<param index="3" name="exclude" type="Array" default="[]" />
+			<param index="3" name="exclude" type="RID[]" default="[]" />
 			<description>
 				Returns a new, pre-configured [PhysicsRayQueryParameters3D] object. Use it to quickly create query parameters using the most common options.
 				[codeblock]
@@ -34,7 +34,7 @@
 		<member name="collision_mask" type="int" setter="set_collision_mask" getter="get_collision_mask" default="4294967295">
 			The physics layers the query will detect (as a bitmask). By default, all collision layers are detected. See [url=$DOCS_URL/tutorials/physics/physics_introduction.html#collision-layers-and-masks]Collision layers and masks[/url] in the documentation for more information.
 		</member>
-		<member name="exclude" type="Array" setter="set_exclude" getter="get_exclude" default="[]">
+		<member name="exclude" type="RID[]" setter="set_exclude" getter="get_exclude" default="[]">
 			The list of objects or object [RID]s that will be excluded from collisions.
 		</member>
 		<member name="from" type="Vector3" setter="set_from" getter="get_from" default="Vector3(0, 0, 0)">
diff --git a/servers/physics_server_3d.cpp b/servers/physics_server_3d.cpp
index db21e1db063..35833341f22 100644
--- a/servers/physics_server_3d.cpp
+++ b/servers/physics_server_3d.cpp
@@ -169,19 +169,19 @@ PhysicsDirectBodyState3D::PhysicsDirectBodyState3D() {}
 
 ///////////////////////////////////////////////////////
 
-void PhysicsRayQueryParameters3D::set_exclude(const Vector<RID> &p_exclude) {
+void PhysicsRayQueryParameters3D::set_exclude(const TypedArray<RID> &p_exclude) {
 	parameters.exclude.clear();
 	for (int i = 0; i < p_exclude.size(); i++) {
 		parameters.exclude.insert(p_exclude[i]);
 	}
 }
 
-Vector<RID> PhysicsRayQueryParameters3D::get_exclude() const {
-	Vector<RID> ret;
+TypedArray<RID> PhysicsRayQueryParameters3D::get_exclude() const {
+	TypedArray<RID> ret;
 	ret.resize(parameters.exclude.size());
 	int idx = 0;
 	for (const RID &E : parameters.exclude) {
-		ret.write[idx++] = E;
+		ret[idx++] = E;
 	}
 	return ret;
 }
@@ -225,7 +225,7 @@ void PhysicsRayQueryParameters3D::_bind_methods() {
 
 ///////////////////////////////////////////////////////
 
-Ref<PhysicsRayQueryParameters3D> PhysicsRayQueryParameters3D::create(Vector3 p_from, Vector3 p_to, uint32_t p_mask, const Vector<RID> &p_exclude) {
+Ref<PhysicsRayQueryParameters3D> PhysicsRayQueryParameters3D::create(Vector3 p_from, Vector3 p_to, uint32_t p_mask, const TypedArray<RID> &p_exclude) {
 	Ref<PhysicsRayQueryParameters3D> params;
 	params.instantiate();
 	params->set_from(p_from);
diff --git a/servers/physics_server_3d.h b/servers/physics_server_3d.h
index 87877ad52d3..de6645f27e9 100644
--- a/servers/physics_server_3d.h
+++ b/servers/physics_server_3d.h
@@ -822,7 +822,7 @@ protected:
 	static void _bind_methods();
 
 public:
-	static Ref<PhysicsRayQueryParameters3D> create(Vector3 p_from, Vector3 p_to, uint32_t p_mask, const Vector<RID> &p_exclude);
+	static Ref<PhysicsRayQueryParameters3D> create(Vector3 p_from, Vector3 p_to, uint32_t p_mask, const TypedArray<RID> &p_exclude);
 	const PhysicsDirectSpaceState3D::RayParameters &get_parameters() const { return parameters; }
 
 	void set_from(const Vector3 &p_from) { parameters.from = p_from; }
@@ -846,8 +846,8 @@ public:
 	void set_hit_back_faces(bool p_enable) { parameters.hit_back_faces = p_enable; }
 	bool is_hit_back_faces_enabled() const { return parameters.hit_back_faces; }
 
-	void set_exclude(const Vector<RID> &p_exclude);
-	Vector<RID> get_exclude() const;
+	void set_exclude(const TypedArray<RID> &p_exclude);
+	TypedArray<RID> get_exclude() const;
 };
 
 class PhysicsPointQueryParameters3D : public RefCounted {